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| 003 | Nust | ||
| 005 | 20221007183324.0 | ||
| 010 | _a 2004046158 | ||
| 020 | _a1580535364 | ||
| 040 | _cNust | ||
| 082 | 0 | 0 | _a681.2,BEE |
| 245 | 0 | 0 |
_aMEMS mechanical sensors / _cStephen Beeby ... [et al.]. |
| 260 |
_aBoston : _bArtech House, _cc2004. |
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| 300 |
_ax, 269 p. : _bill. ; _c26 cm. |
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| 490 | 1 | _aArtech House microelectromechanical system series | |
| 505 | _aIntroduction (Page-1), Materials and fabrication techniques(Page-7), MEMS simulation and design tools (Page-39), Mechanical sensor packaging (Page-57), Mechanical transduction techniques (Page-85), Pressure sensors (Page-113), Force and torque sensors (Page-153), Inertial sensors (Page-173), Flow sensors (Page-213). | ||
| 650 | 0 |
_aDetectors. _9399 |
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| 650 | 0 | _aMicroelectromechanical systems. | |
| 700 | 1 |
_aBeeby, Stephen. _999540 |
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| 830 | 0 |
_aMicroelectromechanical systems series. _999541 |
|
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/fy0611/2004046158.html |
| 942 |
_cREF _2ddc |
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_c175694 _d175694 |
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