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|---|---|---|---|
| 003 | Nust | ||
| 005 | 20221201151817.0 | ||
| 010 | _a 2002276015 | ||
| 020 | _a0201146959 | ||
| 040 | _cNust | ||
| 082 | 0 | 0 | _a621.38152,JAE |
| 100 | 1 |
_aJaeger, Richard C. _955586 |
|
| 245 | 1 | 0 |
_aIntroduction to microelectronic Fabrication / _cRichard C. Jaeger. |
| 250 | _bvol 5 | ||
| 260 |
_aUpper Saddle River, N.J. : _bPrentice Hall, _cc2002. |
||
| 300 |
_axiv,232 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aModular series on solid state devices ; _vv. 5 |
|
| 505 | _aAn Overview of Microelectronic Fabrication (Page-1), Lithography (Page-13), Thermal Oxidation of Silicon (Page-29), Diffusion (Page-49), Ion Implantations (Page-89), Film Deposition (Page-107), Interconnections and Contacts (Page-133), Packing and Yield (Page-153), MOS Process Integration (Page-173), Bipolar Process Integration (Page-201). | ||
| 650 | 0 | _aTelecommunication Engineering | |
| 830 | 0 |
_aModular series on solid state devices (Upper Saddle River, N.J.) ; _955588 |
|
| 942 |
_2ddc _cBK |
||
| 999 |
_c182248 _d182248 |
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