| 000 | 00632 a2200193 4500 | ||
|---|---|---|---|
| 020 | _a354000856X | ||
| 020 | _a9783540008569 | ||
| 082 | 0 | 4 | _a620.5 |
| 090 |
_c462 _d462 |
||
| 100 | _aFujita, Hiroyuki. | ||
| 245 | 1 | 0 |
_aMicromachines as tools for nanotechnology / _cHiroyuki Fujita. |
| 260 |
_a[S.l.] : _bSpringer, _c2003. |
||
| 300 |
_a224 p. ; _c25 cm. |
||
| 490 | 1 | _aMicrotechnology and mems. | |
| 700 | 1 | _aFujita, Hiroyuki. | |
| 830 | 0 | _aMicrotechnology and mems. | |
| 942 |
_aSNS _cBK _k620.5 FUJ |
||
| 999 |
_c29094 _d29094 |
||