000 00632 a2200193 4500
020 _a354000856X
020 _a9783540008569
082 0 4 _a620.5
090 _c462
_d462
100 _aFujita, Hiroyuki.
245 1 0 _aMicromachines as tools for nanotechnology /
_cHiroyuki Fujita.
260 _a[S.l.] :
_bSpringer,
_c2003.
300 _a224 p. ;
_c25 cm.
490 1 _aMicrotechnology and mems.
700 1 _aFujita, Hiroyuki.
830 0 _aMicrotechnology and mems.
942 _aSNS
_cBK
_k620.5 FUJ
999 _c29094
_d29094