| 000 | 00672 a2200193 4500 | ||
|---|---|---|---|
| 020 | _a0750309768 | ||
| 020 | _a9780750309769 | ||
| 082 | 0 | 4 | _a620.044 |
| 090 |
_c822 _d822 |
||
| 100 | 1 | _aMakabe, T. | |
| 245 | 1 | 0 |
_aPlasma electronics : _bapplications in microelectronic device fabrication / _cT. Makabe, Z. Petrovic. |
| 260 |
_a[S.l.] : _bTaylor & Francis, _c2006. |
||
| 300 |
_a360 p. ; _c16 cm. |
||
| 490 | 1 | _aSeries in plasma physics. | |
| 700 | 1 | _aPetrovic, Z. | |
| 830 | 0 | _aSeries in plasma physics. | |
| 942 |
_aSNS _cBK _k620.044 MAK |
||
| 999 |
_c29446 _d29446 |
||