000 00282 a2200121 4500
001 64474
082 _a621.381 BEE
090 _c38097
_d38097
100 _aBeeby S
245 _aMems mechanical sensors
_hEnglish
260 _aBoston
_bArtech house
_c2004
300 _ax, 269p.
942 _aNUST CAE
_k621.381 BEE
999 _c299547
_d299547