| 000 | 01460cam a22003857a 4500 | ||
|---|---|---|---|
| 001 | 13308201 | ||
| 003 | OSt | ||
| 005 | 20211022103928.0 | ||
| 008 | 030811s2004 nyua b 001 0 eng d | ||
| 010 | _a 2003276248 | ||
| 015 | _aGBA3-Y5182 | ||
| 020 | _a0471232793 | ||
| 035 | _a(OCoLC)ocm51838570 | ||
| 038 | _akhadija | ||
| 040 |
_aUKM _cUKM _dHKP _dFUG _dDLC |
||
| 042 | _alccopycat | ||
| 050 | 0 | 0 |
_aTK7871.85 _b.M378 2004 |
| 082 | 0 | 0 |
_a621.38152 _222 _bMAY |
| 100 | 1 |
_aMay, Gary S. _935779 |
|
| 245 | 1 | 0 |
_aFundamentals of semiconductor fabrication / _cGary S. May, Simon M. Sze. |
| 250 | _aWiley international ed. | ||
| 260 |
_aNew York : _bWiley, _cc2004. |
||
| 300 |
_axiii, 305 p. : _bill. ; _c26 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 563 | _apaperback | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. _935780 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. _935781 |
|
| 700 | 1 |
_aSze, S. M., _d1936- _935782 |
|
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/bios/wiley044/2003276248.html |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley037/2003276248.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley032/2003276248.html |
| 906 |
_a7 _bcbc _ccopycat _d2 _encip _f20 _gy-gencatlg |
||
| 942 |
_2ddc _cBK |
||
| 999 |
_c31546 _d31546 |
||