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008 100927s2011 gw | s |||| 0|eng d
020 _a9783642158674
024 7 _a10.1007/978-3-642-15868-1
_2doi
035 _a(WaSeSS)ssj0000508125
038 _akhadija
040 _dWaSeSS
_c.
050 4 _aT174.7
072 7 _aTDPB
_2bicssc
072 7 _aTEC027000
_2bisacsh
082 0 4 _a621.3815
_223
_bSEM
100 1 _aNazarov, Alexei.
_eeditor.
_983371
210 1 0 _aSemiconductor-On-Insulator Materials for Nanoelectronics Applications
245 1 0 _aSemiconductor-On-Insulator Materials for Nanoelectronics Applications /
_cedited by Alexei Nazarov, J.-P. Colinge, Francis Balestra, Jean-Pierre Raskin, Francisco Gamiz, V.S. Lysenko.
260 _c2011.
490 1 _aEngineering Materials,
_x1612-1317
505 0 _aNew semiconductor-on-insulator materials -- Physics of modern SemOI devices -- Diagnostics of the SOI devices -- Sensors and MEMS on SOI.
506 _aLicense restrictions may limit access.
520 _a"Semiconductor-On-Insulator Materials for NanoElectonics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.
563 _aHardcover
650 0 _aEngineering.
650 0 _aNanotechnology.
_92826
650 0 _aSurfaces (Physics).
_920199
650 1 4 _aEngineering.
_983372
650 2 4 _aNanotechnology and Microengineering.
_983373
650 2 4 _aNanotechnology.
_92826
650 2 4 _aSemiconductors.
_911016
650 2 4 _aCharacterization and Evaluation of Materials.
_983289
700 1 _aColinge, J.-P.
_eeditor.
_983374
700 1 _aBalestra, Francis.
_eeditor.
_983375
700 1 _aRaskin, Jean-Pierre.
_eeditor.
_983376
700 1 _aGamiz, Francisco.
_eeditor.
_983377
700 1 _aLysenko, V.S.
_eeditor.
_983378
710 2 _aSpringerLink (Online service)
_981564
773 0 _tSpringer eBooks
773 0 _tSpringerLink ebooks - Chemistry and Materials Science (2011)
776 0 8 _iPrinted edition:
_z9783642158674
830 0 _aEngineering Materials,
_934636
856 4 0 _uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio9061457
_zFull text available from SpringerLink ebooks - Chemistry and Materials Science (2011)
910 _aVendor-generated brief record
942 _2ddc
_cBK
999 _c32994
_d32994