000 01566cam a22004097a 4500
001 9059941
003 OSt
005 20211118114852.0
006 m d
007 cr n
008 110526s2011 gw a s 000 0 eng d
016 7 _a015877277
_2Uk
016 7 _a015885895
_2Uk
020 _a9783642221729 (alk. paper)
035 _a(WaSeSS)ssj0000506036
038 _aKhadija
040 _aBTCTA
_beng
_cBTCTA
_dOHX
_dYDXCP
_dUKMGB
_dBWX
_dEYM
_dAAA
_dDLC
_dWaSeSS
042 _alccopycat
050 4 _aTJ213
_b.C57295 2011
082 0 0 _a629.8
_223
_bCOM
210 1 0 _aControl technologies for emerging micro and nanoscale systems
245 0 0 _aControl technologies for emerging micro and nanoscale systems /
_cEvangelos Eleftheriou and S.O. Reza Moheimani (eds.).
260 _aBerlin ;
_bSpringer Verlag,
_c2011.
490 1 _aLecture notes in control and information sciences,
_x0170-8643 ;
_v413
506 _aLicense restrictions may limit access.
563 _aPB
650 0 _aMicroelectromechanical systems.
_984458
650 0 _aAutomatic control.
_984459
650 0 _aMicroscopy.
_984460
700 1 _aEleftheriou, Evangelos
_984461
700 1 _aMoheimani, S. O. Reza,
_d1967-
_984462
773 0 _tSpringerLink ebooks - Engineering (2011)
830 0 _aLecture notes in control and information sciences ;
_v413
_984463
856 4 0 _uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio9059941
_zFull text available from SpringerLink ebooks - Engineering (2011)
910 _aLibrary of Congress record
942 _2ddc
_cBK
999 _c33123
_d33123