| 000 | 01553cam a22004097a 4500 | ||
|---|---|---|---|
| 001 | 9060006 | ||
| 003 | OSt | ||
| 005 | 20211209105420.0 | ||
| 006 | m d | ||
| 007 | cr n | ||
| 008 | 100927s2011 gw a fsb 001 0 eng d | ||
| 020 | _a9783642129025 | ||
| 035 | _a(WaSeSS)ssj0000508085 | ||
| 038 | _akhadija | ||
| 040 |
_aNz _cUW1 _dBTCTA _dYDXCP _dPAU _dOHX _dIUL _dOCLCO _dDLC _dWaSeSS |
||
| 042 | _alccopycat | ||
| 050 | 4 |
_aTK7874 _b.D4744 2011 |
|
| 050 | 4 | _aTK7875 | |
| 082 | 0 | 4 |
_a658.5752 _222 _bDES |
| 210 | 1 | 0 | _aDesign and manufacturing of active microsystems |
| 245 | 0 | 0 |
_aDesign and manufacturing of active microsystems / _cStephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, editors. |
| 260 |
_aHeidelberg, [Germany] : _bSpringer, _cc2011. |
||
| 490 | 0 |
_aMicrotechnology and MEMS, _x1615-8326 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 506 | _aLicense restrictions may limit access. | ||
| 563 | _aHB | ||
| 650 | 0 |
_aMicroelectronics. _986174 |
|
| 650 | 0 |
_aMicroelectromechanical systems. _986175 |
|
| 700 | 1 |
_aBüttgenbach, S. _q(Stephanus), _d1945- _986176 |
|
| 700 | 1 |
_aBurisch, Arne. _986177 |
|
| 700 | 1 |
_aHesselbach, Jürgen. _986178 |
|
| 773 | 0 | _tSpringerLink ebooks - Chemistry and Materials Science (2011) | |
| 830 | 0 |
_aMicrotechnology and MEMS. _986179 |
|
| 856 | 4 | 0 |
_uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio9060006 _zFull text available from SpringerLink ebooks - Chemistry and Materials Science (2011) |
| 910 | _aLibrary of Congress record | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c33124 _d33124 |
||