| 000 | 01243cam a22003254a 4500 | ||
|---|---|---|---|
| 001 | 12362221 | ||
| 003 | USPCAS-E | ||
| 005 | 20180118181420.0 | ||
| 008 | 010328s2002 caua b 001 0 eng | ||
| 010 | _a 2001089414 | ||
| 020 | _a0125249756 | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTA418.9.T45 _bO47 2002 |
| 082 | 0 | 0 |
_a621.38152 _222 _bOHR-M 2002 |
| 100 | 1 |
_aOhring, Milton, _d1936- |
|
| 245 | 1 | 0 |
_aMaterials science of thin films : _bdeposition and structure / _cMilton Ohring. |
| 250 | _a2nd ed. | ||
| 260 |
_aSan Diego, CA : _bAcademic Press, _c2002. |
||
| 300 |
_axxi, 794 p. : _bill. ; _c24 cm. |
||
| 502 | _a. | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aThin films. | |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/els031/2001089414.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/els031/2001089414.html |
| 856 | 4 | 2 |
_3Book review (E-STREAMS) _uhttp://www.e-streams.com/es0505/es0505_1873.htm |
| 906 |
_a7 _bcbc _corignew _d2 _eepcn _f20 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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| 999 |
_c355986 _d355986 |
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