000 00353nam a2200133Ia 4500
008 210430s9999 xx 000 0 und d
020 _a224522452245
082 _a502.82 J549 S
100 _aJEOL
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245 _aService Manual of Scanning Probe Microscope JSPM-5200
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260 _aJapan
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_c2007
300 _a126p.
942 _cBK
_2ddc
999 _c563332
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