000			00321nam a2200121Ia 4500
008			210430s9999 xx 000 0 und d
020			_a978-0-387-75577-9
082			_a620.5 C966N
100			_aZheng Cui
245			_aNanofabrication Principles, Capabilities and Limits _cZheng Cui
300			_a344
942			_cBK _2ddc
999			_c565132 _d565132