| 000 | 00404nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 210430s9999 xx 000 0 und d | ||
| 020 | _a978-3-662-44394-1 | ||
| 082 | _a670 G258M | ||
| 100 |
_aHans H. Gatzen, Volker Saile, Jurg Leuthold _954775 |
||
| 245 |
_aMicro and Nano Fabrication Tool and Processes / _cHans H. Gatzen, |
||
| 260 |
_c2015 _aNew York _bSpringer |
||
| 300 | _a519 | ||
| 942 |
_cBK _2ddc |
||
| 999 |
_c565493 _d565493 |
||