| 000 | 00932cam a22002654a 4500 | ||
|---|---|---|---|
| 001 | 12911145 | ||
| 003 | CEME | ||
| 005 | 20210628201521.0 | ||
| 008 | 020829s2003 flua b 001 0 eng | ||
| 010 | _a 2002031599 | ||
| 020 | _a1584883065 (alk. paper) | ||
| 040 |
_aDLC _cDLC _dDLC |
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| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7875 _b.P45 2003 |
| 082 | 0 | 0 |
_a621.3 _221 |
| 100 | 1 |
_aPelesko, John A, Bernstein, David H _955616 |
|
| 245 | 1 | 0 |
_aModeling MEMS and NEMS / _cJohn A. Pelesko and David H. Bernstein. |
| 260 |
_aBoca Raton, FL : _bChapman & Hall/CRC, _c2003. |
||
| 300 |
_axxiii, 357 p. : _bill. ; 24 cm. |
||
| 504 | _aIncludes bibliographical references and i(p. 325-340) and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems _xMathematical models. _955617 |
|
| 700 | 1 |
_aBernstein, David H. _955618 |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0646/2002031599-d.html |
| 942 |
_2ddc _cBK |
||
| 999 |
_c566409 _d566409 |
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