| 000 | 00545nam a22001817a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628202058.0 | ||
| 008 | 210225b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0-19-513605-5 | ||
| 040 | _c. | ||
| 082 | _a621.38152 CAM | ||
| 100 |
_aCampbell, Stephen A _958177 |
||
| 245 | _aThe science and engineering of microelectronic fabrication | ||
| 260 |
_aNEW YORK _bOXFORD UNIVERSITY PRESS _c2001 |
||
| 300 | _aXIV,604P | ||
| 650 |
_aSEMICONDUTOR-DESIGN AND CONSTRUCTION MICROELECTRONIC FABRICATION _958178 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c568387 _d568387 |
||