| 000 | 00501nam a22001817a 4500 | ||
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| 003 | CEME | ||
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| 008 | 210201b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0750303115 | ||
| 040 | _c. | ||
| 082 | _a621.38152 HAN | ||
| 100 |
_aGlocker, David.A , Shah, Ismat.S _963454 |
||
| 245 | _aHandbook of thin film process technology , vol-1 | ||
| 260 |
_aLONDON _bINSTITUTE OF PHYSICS _c1995 |
||
| 300 | _a1240P | ||
| 650 |
_aTHIN FILM PROCESS TECHNOLOGY _963455 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c572271 _d572271 |
||