| 000 | 00554nam a22001817a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628203126.0 | ||
| 008 | 210201b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780815520313 | ||
| 040 | _c. | ||
| 082 | _a621.38152 MAR | ||
| 100 |
_aMartin, Peter.M _963466 |
||
| 245 | _aHandbook of deposition technologies for films and coatings , science, applications and technology | ||
| 260 |
_aUSA _bELSEVIER _c2005 |
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| 300 | _aXVIII,912P | ||
| 650 |
_aDEPOSITION TECHNOLOGIES FOR FILMS AND COATINGS.THIN FILM _963467 |
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| 942 |
_cBK _2ddc |
||
| 999 |
_c572277 _d572277 |
||