| 000 | 00582nam a22001937a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628203126.0 | ||
| 008 | 210201b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0815514425 | ||
| 040 | _c. | ||
| 082 | _a621.38172 HAN | ||
| 100 |
_aSeshan, Krishna _963469 |
||
| 245 | _aHandbook of thin film deposition processes and techniques , principles, methods, equpment and applicaitons | ||
| 250 | _a2ND | ||
| 260 |
_aNEW YORK _bNOYES PUBLICATIONS _c2002 |
||
| 300 | _aXVIII, 317P | ||
| 650 |
_aTHIN FILM DEVICES-DESIGN AND CONSTRUCTION. _963470 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c572279 _d572279 |
||