000			00532nam a22001817a 4500
003			CEME
005			20210628203127.0
008			210201b xxu||||| |||| 00| 0 eng d
020			_a0815514832
040			_c.
082			_a621.38152 WAS
100			_aWasa, Kiyotaka , Kitabatake, Makoto , Adachi, Hideaki _963480
245			_aThin film materials technology , sputtering of compound materials
260			_aJAPAN _bSPRINGER _c2004
300			_aXIV, 518P
650			_aTHIN FILM MATERIALS TECHNOLOGY _963481
942			_cBK _2ddc
999			_c572285 _d572285