| 000 | 00428nam a22001697a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628203136.0 | ||
| 008 | 210201b xxu||||| |||| 00| 0 eng d | ||
| 040 | _c. | ||
| 082 | _a621.38152 THI | ||
| 100 |
_aVossen, John.L , Kern, Werner _963594 |
||
| 245 | _aThin film processes | ||
| 260 |
_aNEW YORK _bACADEMIC PRESS _c1978 |
||
| 300 | _a575P | ||
| 650 |
_aTHIN FILM PROCESSES _963461 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c572361 _d572361 |
||