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| 005 | 20210628203137.0 | ||
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| 020 | _a008044640X | ||
| 040 | _c. | ||
| 082 | _a621.38152 MAC | ||
| 100 |
_aMachlin, E.S _963604 |
||
| 245 | _aMaterials science in microelectronics , the relationships between thin film processing and structure | ||
| 260 |
_aBOSTON _bELSEVIER _c2005 |
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| 650 |
_aMATERIALS SCIENCE IN MICROELECTRONICS _963605 |
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| 942 |
_cBK _2ddc |
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_c572367 _d572367 |
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