| 000 | 00537nam a22001817a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628203209.0 | ||
| 008 | 210122b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0-8493-9139-3 | ||
| 040 | _cceme | ||
| 082 | _a621.381 MEM | ||
| 100 |
_aMohamed Gad-El-Hak, Gad-El-Hak, Mohamed _963897 |
||
| 245 | _aThe mems handbook, mems applications | ||
| 260 |
_aNEW YORK _bTAYLOR AND FRANCIS _c2006 |
||
| 300 | _aXIV,890P | ||
| 650 |
_aMICROELECTROMECHANICAL SYSTEMS.DETECTORS.MICROACTUATORS.ROBOTS _963915 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c572601 _d572601 |
||