000 00483nam a22001817a 4500
003 CEME
005 20210628203325.0
008 210304b xxu||||| |||| 00| 0 eng d
020 _a0-8493-9451-1
040 _c.
082 _a621.38152 MAD
100 _aMadou, Marc
_964720
245 _aFundamentals of microfabrication
260 _aNEW YORK
_bCRC PRESS
_c2002
300 _a589P
650 _aMICROELECTRONIC PACKAGING.LASER-INDUSTRIAL APPLICATION
_964721
942 _cBK
_2ddc
999 _c573131
_d573131