| 000 | 00514nam a22001817a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628203422.0 | ||
| 008 | 210118b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0-07145556-6 | ||
| 040 | _cceme | ||
| 082 | _a621.381046 GIL | ||
| 100 |
_aGilleo, Ken _962951 |
||
| 245 | _aMems moems packaging | ||
| 260 |
_aUSA _bMCGRAW HILL _c2005 |
||
| 300 | _aXIII, 220P | ||
| 650 |
_aMICROELECTRONIC PACKAGING. MICROELECTROMECHANICAL SYSTEMS.OPTOELECTRONIC DEVICES.MEMS.MOEMS _965319 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c573570 _d573570 |
||