| 000 | 00627nam a22001937a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628203943.0 | ||
| 008 | 210104b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781420055115 | ||
| 040 | _cceme | ||
| 082 | _a620.5 MAD | ||
| 100 |
_aMadou, Marc.J _967994 |
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| 245 | _aFundamentals of microfabricaiton and nanotechnology, solid - state physics, fluidics, and analytical techniques in micro and nanotechnology | ||
| 250 | _a3RD | ||
| 260 |
_aINDIA _bCRC PRESS _c2012 |
||
| 300 | _aVOL-1, XIII,637P | ||
| 650 |
_aMICROELECTROMECHANICAL SYSTEMS.NANOELECTROMECHANICAL SYSTEMS. _967995 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c575664 _d575664 |
||