| 000 | 00443nam a22001697a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628204023.0 | ||
| 008 | 210114b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9788461622078 | ||
| 040 | _cceme | ||
| 082 | _a621.381 ALV | ||
| 100 |
_aParvej Ahmad Alvi _968289 |
||
| 245 | _aMems pressure sensors: fabrication and technologic process optimization | ||
| 260 |
_aSPAIN _bIFSA _c2012 |
||
| 300 | _a173P | ||
| 942 |
_cBK _2ddc |
||
| 999 |
_c575892 _d575892 |
||