000 00443nam a22001697a 4500
003 CEME
005 20210628204023.0
008 210114b xxu||||| |||| 00| 0 eng d
020 _a9788461622078
040 _cceme
082 _a621.381 ALV
100 _aParvej Ahmad Alvi
_968289
245 _aMems pressure sensors: fabrication and technologic process optimization
260 _aSPAIN
_bIFSA
_c2012
300 _a173P
942 _cBK
_2ddc
999 _c575892
_d575892