000 00576nam a22001817a 4500
003 CEME
005 20210628204055.0
008 210107b xxu||||| |||| 00| 0 eng d
020 _a9781439837320
040 _cceme
082 _a620.5 SYS
100 _aDarrin, M. Ann Garrison , Barth, Janet L
_968600
245 _aSystems engineering , for microscale and nanoscale technologies
260 _aNEW YORK
_bCRC PRESS
_c2012
300 _aXIII, 569P
650 _aSYSTEMS ENGINEERING FOR MICROSCALE. SYSTEMS ENGINEERING FOR NANOSCALE TECHNOLOGIES
_968601
942 _cBK
_2ddc
999 _c576132
_d576132