| 000 | 00541nam a22001817a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628210024.0 | ||
| 008 | 210210b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0-89006-581-0 | ||
| 040 | _c. | ||
| 082 | _a621.381 MAL | ||
| 100 |
_aWilliams, Kirt Maluf, Nadim _977871 |
||
| 245 | _aAn introduction to microelectromechanical systems engineering:mem mem | ||
| 260 |
_aBOSTON _bARTECH HOUSE _c2000 |
||
| 300 | _a265P | ||
| 650 |
_aMICROELECTROMECHANICAL SYSTEMS ELECTROMECHANICAL SYSTEMS.MEM _962760 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c583062 _d583062 |
||