000			00494nam a22001817a 4500
003			CEME
005			20210628210738.0
008			210212b xxu||||| |||| 00| 0 eng d
020			_a0-19-856528-3
040			_c.
082			_a621.3 FUJ
100			_aFujimasa, Iwao _980817
245			_aMicromachines a new era in mechanical engineering
260			_aOXFORD _bOXFORD UNIVERSITY PRESS _c1996
300			_a176P
650			_aMECHANICAL ENGINEERING NANOTECHNOLOGY _980818
942			_cBK _2ddc
999			_c585685 _d585685