| 000 | 00451nam a22001817a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628210741.0 | ||
| 008 | 210106b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780824790240 | ||
| 040 | _c. | ||
| 082 | _a621.381531 SUZ | ||
| 100 |
_aSuzuki, Kazuaki, Smith, Bruce W _980838 |
||
| 245 | _aMicrolithography science and technology | ||
| 250 | _a2ND | ||
| 260 |
_aLONDON _bCRC PRESS _c2007 |
||
| 300 | _a835P | ||
| 942 |
_cBK _2ddc |
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| 999 |
_c585698 _d585698 |
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