000 00423nam a22001337a 4500
020 _a9788461622078
040 _cNUST
082 _a621.381 ALV
100 _aAlvi, Parvej Ahmad
_9111988
245 _aMEMS Pressure Sensors;
_bFabrication and Process Optimization
260 _aSpain;
_bInternational Frequency Sensor Association Publishing (IFSA),
_c2012.
650 _aMEMS Pressure Sensors.
_9112198
942 _2ddc
_cBK
999 _c594561
_d594561