| 000 | 00783 a2200229 4500 | ||
|---|---|---|---|
| 020 | _a0-8493-2838-1 | ||
| 040 |
_aDLC _bDLC |
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| 082 | 0 | 0 | _a621.381 |
| 100 | 1 | _aLyshevski, Sergey Edward. | |
| 245 | 1 | 0 |
_aNano-and micro-electromechanical systems: fundamentals of nano- and microengineering _bfundamentals of nano- and microengineering _cSergey Edward Lyshevski. |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton, Fla. : _bCRC Press, _c2005 |
||
| 300 |
_a722 s. _bill. |
||
| 440 | 0 |
_aNano- and microscience, engineering, technology, and medicine series ; _v8 |
|
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aNanotechnology. | |
| 650 | 0 | _aMikroelektronik | |
| 650 | 0 | _aNanoteknik | |
| 650 | 0 | _aNanotechnology | |
| 650 | 0 | _aMicroelectronics | |
| 942 |
_cBK _k621.381 LYS _2ddc |
||
| 999 |
_c7997 _d7997 |
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